| 000 | 00881nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | adlib96000001 | ||
| 003 | ViArRB | ||
| 005 | 200902210153555.7 | ||
| 008 | 960221s1955 dcuabcdjdbkoqu001 0deng d | ||
| 020 | _a0-8493-2838-1 | ||
| 022 | _a | ||
| 040 | _aAdlib | ||
| 082 | _a621.382:620.3 | ||
| 245 | _aNano and micro electomechanical systems: fundamentals of nano and microengineering | ||
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton _bCRC Press _c2005 |
||
| 300 |
_a722p. _c |
||
| 500 | _a | ||
| 100 |
_aLyshevski, Sergey Edward _e |
||
| 700 |
_a _a |
||
| 942 | _cBK | ||
| 653 |
_aMicroelectronics _aElectronics _aSemiconductors _aNanotechnology _aMicroelectromechanical systems _aMEMS _aNEMS _aNanoelectromechanical systems _aBiomimetics |
||
| 952 |
_w2010-06-16 _p00055255 _r2012-03-15 _40 _00 _bUL _10 _o621.382:620.3 LYS _d2010-06-16 _70 _yBK _s2012-02-21 _l8 _aUL |
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| 999 |
_c50586 _d50585 |
||