| 000 | 00790nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | adlib96000001 | ||
| 003 | ViArRB | ||
| 005 | 200902210153555.7 | ||
| 008 | 960221s1955 dcuabcdjdbkoqu001 0deng d | ||
| 020 | _a0-07-048709-x | ||
| 022 | _a | ||
| 040 | _aAdlib | ||
| 082 | _a621.38 | ||
| 245 | _aMEMS and microsystems: design and manufacture | ||
| 250 | _a | ||
| 260 |
_aNew Delhi _bTata McGraw- Hill _c2005 |
||
| 300 |
_axii,436p. _c |
||
| 500 | _a | ||
| 100 |
_aHsu, Tai-Ran _e |
||
| 700 |
_a _a |
||
| 942 | _cBK | ||
| 653 |
_aMicroelectronics _aElectronics _aSemiconductors _aMicroelectromechanical systems _aMEMS _aMicroelectronic packaging |
||
| 952 |
_w2010-06-16 _p00056241 _r2013-03-04 _40 _00 _bUL _10 _o621.38 HSU _d2010-06-16 _q2013-03-19 _70 _yBK _s2013-03-04 _l2 _aUL |
||
| 999 |
_c50923 _d50922 |
||