| 000 | 00741nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | adlib96000001 | ||
| 003 | ViArRB | ||
| 005 | 200902210153555.7 | ||
| 008 | 960221s1955 dcuabcdjdbkoqu001 0deng d | ||
| 020 | _a9781402059483 | ||
| 022 | _a | ||
| 040 | _aAdlib | ||
| 082 | _a67.02-181.4 | ||
| 245 | _aMicromanufacturing: international research and development | ||
| 250 | _a | ||
| 260 |
_aDordrecht _bSpringer _c2007 |
||
| 300 |
_axxxix, 362p _c |
||
| 500 | _a | ||
| 100 |
_aEhmann, Kornel F. _e |
||
| 700 |
_a...[et al.] _a |
||
| 942 | _cBK | ||
| 653 |
_aMicrofabrication _aMicromachining _aMicromanufacturing |
||
| 952 |
_w2010-06-16 _p00058737 _r2010-06-16 _40 _00 _bUL _10 _o67.02-181.4 EHM _d2010-06-16 _70 _yBK _aUL |
||
| 999 |
_c52145 _d52144 |
||