| 000 | 00780nam a2200253 a 4500 | ||
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| 001 | adlib96000001 | ||
| 003 | ViArRB | ||
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| 020 | _a0-471-86109-x | ||
| 022 | _a | ||
| 040 | _aAdlib | ||
| 082 | _a621.382 | ||
| 245 | _aMicrosensor, MEMS and smart devices | ||
| 250 | _a | ||
| 260 |
_aChichester _bJohn Wiley & Sons _c2007 |
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| 300 |
_axvi,503p. _c |
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| 500 | _a | ||
| 100 |
_aGardner, Julian W. _e |
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| 700 |
_a _a |
||
| 942 | _cBK | ||
| 653 |
_aMicroelectronics _aElectronics _aSemiconductors _aMEMS _aMicroelectromechanical systems _aMicrosensors _aMicromachines |
||
| 952 |
_w2010-06-16 _p00058161 _r2010-10-06 _40 _00 _bUL _10 _o621.382 GAR _d2010-06-16 _70 _yBK _s2010-09-29 _l1 _aUL |
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