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008 960221s1955 dcuabcdjdbkoqu001 0deng d
020 _a9789812700766
022 _a
040 _aAdlib
082 _a620.3
245 _aNanofabrication: fundamentals and applications
250 _a
260 _aSingapore
_bWorld Scientific Publishing
_c2008
300 _aviii, 574p
_c
500 _a
100 _aTseng, Ampere A.
_eed.by
700 _a
_a
942 _cBK
653 _aNano technology
_aNano fabrication
_aNano scale structures
_aNano devices
_aFabrication - Nano technology
952 _w2010-06-16
_p00061205
_r2010-06-16
_40
_00
_bUL
_10
_o620.3 TSE
_d2010-06-16
_70
_yBK
_aUL
999 _c54567
_d54566