| 000 | 00628nam a22001697a 4500 | ||
|---|---|---|---|
| 005 | 20100909143419.0 | ||
| 008 | 100909t xxu||||| |||| 00| 0 eng d | ||
| 080 |
_a621.382 _bLIU |
||
| 100 |
_aLiu, Ai-Qun...[et.al] _913043 |
||
| 245 |
_aPhotonic MEMS devices _bdesign,fabrication and control _cAi-Qun Liu...[et.al] |
||
| 300 | _a483p. | ||
| 653 | _aMicroelectromechanical systems | ||
| 942 | _cBK | ||
| 260 |
_aBoca Raton _bCRC Press _c2009 _9212 |
||
| 020 | _a9781420045680 | ||
| 952 |
_w2010-09-09 _p00063337 _r2013-01-16 _40 _00 _bUL _m3 _10 _o621.382 LIU _d2010-09-09 _q2013-01-31 _70 _cGEN _2udc _yBK _s2013-01-16 _l2 _aUL |
||
| 999 |
_c67974 _d67973 |
||