| 000 | 00756nam a2200253 a 4500 | ||
|---|---|---|---|
| 001 | adlib96000001 | ||
| 003 | ViArRB | ||
| 005 | 200902210153555.7 | ||
| 008 | 960221s1955 dcuabcdjdbkoqu001 0deng d | ||
| 020 | _a | ||
| 022 | _a | ||
| 040 | _aAdlib | ||
| 082 | _a621.375.826:539.23 | ||
| 245 | _aLaser microfabrication: thin film process and lithography | ||
| 250 | _a | ||
| 260 |
_aBoston _bAcademic Press _c1989 |
||
| 300 |
_axii, 587p. _c |
||
| 500 | _a | ||
| 100 |
_aLaser _e |
||
| 700 |
_a _a |
||
| 942 | _cBK | ||
| 653 |
_alaser fabrication _aThin film process _alithography _aEhrlich, Daniel J |
||
| 952 |
_w2010-11-24 _p00036946 _r2012-07-26 _40 _00 _bUL _10 _o621.375.826:539.23 EHR _d2010-11-24 _70 _yBK _s2012-07-24 _l1 _aUL |
||
| 999 |
_c69265 _d69264 |
||