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| 001 | adlib96000001 | ||
| 003 | ViArRB | ||
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| 008 | 960221s1955 dcuabcdjdbkoqu001 0deng d | ||
| 020 | _a | ||
| 022 | _a | ||
| 040 | _aAdlib | ||
| 082 | _a621.52 | ||
| 245 | _aVacuum Technology , Thin Films , and Sputtering , an Introduction | ||
| 250 | _a | ||
| 260 |
_aNew York _bAcademic Press _c1983 |
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| 300 |
_aviii, 151 p. _c |
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| 500 | _a | ||
| 100 |
_aStuart , R. V _e |
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| 700 |
_a _a |
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| 942 | _cBK | ||
| 653 |
_aThin films ,Vacuum Technology _aSputterng , Thin Films-Vacuum Technology |
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| 952 |
_w2010-11-24 _p00024965 _r2011-08-23 _40 _00 _bUL _10 _o621.52 STU _d2010-11-24 _70 _yBK _s2011-07-06 _l1 _aUL |
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