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020 _a
022 _a
040 _aAdlib
082 _a621.52 (091)
245 _aHistory Of Vacuum Science and Technology
250 _a
260 _aNew York
_bAmerican Institute of physics
_c1984
300 _a
_c
500 _a Special Volume Commemorating 30th Anniversary Of The American Vacuum Society , 1953 - 1983
100 _aTheodore E . Madey
_eed. by
700 _aWilliam C. Brown
_a
942 _cBK
653 _aVacuum Science and Technology History
952 _w2010-11-24
_pG0003578
_r2010-11-24
_40
_00
_bUL
_10
_o621.52 (091) MAD
_d2010-11-24
_70
_yBK
_aUL
999 _c69566
_d69565