000 00660 a2200169 4500
005 20120229121919.0
008 120229t xxu||||| |||| 00| 0 eng d
080 _a621.039.629
_bLUC
100 _aLucyszyn, Stepan., ed.
_eed.by
_919430
245 _aAdvanced RF MEMS
300 _axxviii, 412p.
653 _aRadio frequency MEMS
_aMEMS-Micro Electrionic Mechanical Systems
_aNiche switch - technology
942 _cBK
260 _aNew Delhi
_bCambridge university press
_c2010
_913794
020 _a9780521897716
952 _w2011-05-31
_p00066096
_v0.00
_r2011-05-31
_40
_e91
_00
_bUL
_10
_o621.039.629 LUC
_d2011-05-31
_70
_cGEN
_2udc
_g0.00
_yBK
_aUL
999 _c72159
_d72158