| 000 | 00790 a2200217 4500 | ||
|---|---|---|---|
| 005 | 20130517154727.0 | ||
| 008 | 130517b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a978142005545 | ||
| 080 |
_a621.382:620.3 _bMAD.1-.3 R |
||
| 100 | _aMadou, Marc J | ||
| 245 | _aFundamentals of microfabrication and nanotechnology | ||
| 250 | _a3rd ed. | ||
| 260 |
_bCRC Press _c2012 _aBoca Raton |
||
| 300 | _a3v. | ||
| 500 | _aV1. Solid state physics, fluidics and analytical techniques in micro and nanotechnology V2.Manufacturing techniques for microfabrication and nano technology V3. From Mems to Bio-MEMS and Bio-NEMS | ||
| 653 | _aMicroelectromechanical systems | ||
| 653 | _aNano electromechanical systems | ||
| 653 | _aMicrofluidics | ||
| 653 | _aSolidstate physics | ||
| 942 | _cREF | ||
| 999 |
_c73836 _d73835 |
||