000 00614 a2200181 4500
005 20120724145014.0
008 120724t xxu||||| |||| 00| 0 eng d
080 _a621.315.612
_bDOR
100 _aDorey, Robert
_920990
245 _aCeramic thick films for MEMS and microdevices
300 _a191p.
653 _aPiezoelectric devices
653 _aCeramic thick films
942 _cBK
260 _bElsevier
_c2012
_aAmsterdam
_920863
020 _a9781437778175
952 _w2012-01-18
_p00066925
_v0.00
_r2012-01-18
_40
_e121
_00
_bUL
_10
_o621.315.612 DOR
_d2012-01-18
_70
_cGEN
_2udc
_g0.00
_yBK
_aUL
999 _c74599
_d74598