000 00561 a2200193 4500
005 20130708143636.0
008 130708b xxu||||| |||| 00| 0 eng d
020 _a9788126527151
080 _a681.586
_bANA
100 _aAnanthasuresh, G K ...[et.al]
245 _aMicro and smart systems
_cG. K. Amamthasuresh...[et.al]
260 _bWiley India
_c2010
_aNew Delhi
300 _axxvii, 390p.
653 _aMicro systems - Sensors
653 _aMicrofabrication
653 _aMicromachining technologies
653 _aFinite element method
942 _cBK
999 _c76208
_d76207