| 000 | 00656 a2200181 4500 | ||
|---|---|---|---|
| 005 | 20140326112213.0 | ||
| 008 | 130520b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781574447293 | ||
| 080 |
_a621.3.049.77 _bLEE |
||
| 100 |
_aLee, El-Hang...[et.al];ed., _eed. by |
||
| 245 |
_aVLSI micro-and nanophotonics _bscience technology and applications _cEl-Hang Lee...[et.al] |
||
| 260 |
_bCRC press _c2011 _aBoca Raton |
||
| 300 | _axx, various pagination | ||
| 653 | _aMicroelectromechanical systems-technological innovations | ||
| 653 | _aNanophotonics-technological innovations | ||
| 653 | _aIntergrated circuits-very large scale integration | ||
| 942 | _cBK | ||
| 999 |
_c76802 _d76801 |
||