| 000 | 00490 a2200181 4500 | ||
|---|---|---|---|
| 005 | 20140109151859.0 | ||
| 008 | 131106b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780080964546 | ||
| 080 |
_a681.2:620.3 _bLEA |
||
| 100 | _a Leach, Richard K | ||
| 245 | _aFundamental principles of engineering nanometrology | ||
| 260 |
_bElsevier _c2010 _aAmsterdam |
||
| 300 | _axxvi, 321p. | ||
| 653 | _aNanometrology | ||
| 653 | _aNanotechnology | ||
| 653 | _aCoordinate metrology | ||
| 942 | _cBK | ||
| 999 |
_c77271 _d77270 |
||