000 00547 a2200193 4500
005 20140722100304.0
008 140722b xxu||||| |||| 00| 0 eng d
020 _a9781439854815
080 _a535:681.7
_bHAR
100 _aHarding, Kevin; ed.
_eed. by
245 _aHandbook of optical dimensional metrology
260 _c2013
_bCRC Press
_aBoca Raton
300 _axiii, 492p.
490 _aOptics and optoelectronics
653 _aMeasurement - Handbook
653 _aOptical measurements
653 _aDimensional analysis
942 _cBK
999 _c78560
_d78559