| 000 | 00654 a2200217 4500 | ||
|---|---|---|---|
| 005 | 20150406145346.0 | ||
| 008 | 150401b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9783527334995 | ||
| 080 |
_a621.3.049.77 _bBRA |
||
| 100 | _aBrand, Oliver | ||
| 245 |
_aCMOS-MEMS _cOliver Brand and Gary K. Fedder |
||
| 260 |
_c2013 _bWiley-VCH Verlag _aGermany |
||
| 300 | _axiv, 594p. | ||
| 490 | _aAdvanced micro and nanosystems | ||
| 653 | _aIntegrated circuits design | ||
| 653 | _aCMOS-MEMS-Biological and chemical application | ||
| 653 | _aMicroelectromechanical systems | ||
| 653 | _aCMOS based sensors | ||
| 700 | _aFedder, Gary K; ed. | ||
| 942 | _cBK | ||
| 999 |
_c80747 _d80746 |
||