| 000 | 00417 a2200157 4500 | ||
|---|---|---|---|
| 005 | 20160405154744.0 | ||
| 008 | 160405b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781482236101 | ||
| 080 |
_a535.241 _bSIR |
||
| 100 | _aSirohi, Rajpal S. | ||
| 245 | _aIntroduction to optical metrology | ||
| 260 |
_c2016 _bCRC press _aNewyork |
||
| 300 | _axxvi, 423p. | ||
| 653 | _aMetrology - optical measurements | ||
| 942 | _cBK | ||
| 999 |
_c83489 _d83488 |
||