| 000 | 00685nam a22001697a 4500 | ||
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| 005 | 20091016150721.0 | ||
| 008 | 091016t xxu||||| |||| 00| 0 eng d | ||
| 020 | _a3-540-25377-7 | ||
| 080 |
_a621.7/9 _bMAH |
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| 100 |
_aMahalik, N.P.[ed.] _eed.by _97261 |
||
| 245 | _aMicromanufacturing and nanotechnology | ||
| 260 |
_aGermany _bSpringer- Verlag _c2006 _97262 |
||
| 300 | _axiv, 468p. | ||
| 653 |
_aNanotechnology _aMicro manufacturing _aMicroelectromechanical system (MEMS) _aMicro-opto-electro-mechanical system (MOEMS) _a(MEMS) _a(MOEMS) |
||
| 942 | _cBK | ||
| 952 |
_w2009-10-16 _p00055110 _r2011-06-27 _40 _00 _bUL _10 _o621.7/9 MAH _d2009-10-16 _70 _2udc _yBK _s2011-05-28 _l1 _aUL |
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_c8710 _d8709 |
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