| 000 | 00120 a2200061 4500 | ||
|---|---|---|---|
| 999 |
_c87991 _d87990 |
||
| 005 | 20180829144053.0 | ||
| 008 | 180829b ||||| |||| 00| 0 eng d | ||
| 020 | _a9783662443941 | ||
| 080 |
_a621.382:620.3 _bGAT |
||
| 100 | _aGatzen, Hans H | ||
| 245 |
_aMicro and nanofabrication _btools and processes |
||
| 260 |
_aNewyork _bSpringer _c2015 |
||
| 300 | _axxvi, 519p. | ||
| 653 | _aMicroelectromechanical system(MEMS) | ||
| 653 | _aNanoelectromechanical system(NEMS) | ||
| 653 | _aMicrofabrication | ||
| 700 | _aSaile, Volker | ||
| 700 | _aLeuthold, Jurg | ||
| 942 | _cBK | ||