| 000 | 00639nam a22001697a 4500 | ||
|---|---|---|---|
| 005 | 20091020105723.0 | ||
| 008 | 091020t xxu||||| |||| 00| 0 eng d | ||
| 020 | _a7-04-017663-7 | ||
| 080 |
_a621.71.9 _bCUI |
||
| 100 |
_aCui, Zheng _97593 |
||
| 245 |
_aMicro - nano fabrication: _btechnologies and applications |
||
| 260 |
_aBeijing _bHigher education press _c2005 _97594 |
||
| 300 | _ax, 304p. | ||
| 653 |
_aOptical lithography _aElectron beam lithography _aIon beam lithography _aFabrication technologies |
||
| 942 | _cBK | ||
| 952 |
_w2009-10-20 _p00055233 _r2009-10-20 _40 _00 _bUL _10 _o621.71.9 CUI _d2009-10-20 _70 _2udc _yBK _aUL |
||
| 999 |
_c8891 _d8890 |
||