000			01080nam a22002297a 4500
005			20091022100132.0
008			091022t xxu||||| |||| 00| 0 eng d
080			_a621(035) _bGAD.1
100			_aGad-el-Hak, Muhamed [ed.] _eed. by _97939
245			_aMEMS: _bintroduction and fundamentals
300			_avarious pagination _b3v.
490			_a(Mechanical Engineering)
653			_aMicroelectronics _aNanotechnology _aMicroelectromechanical systmes _aMEMs-fundamentals
942			_cREF
260			_aBoca Raton _bCRC Taylor & Francis _c2006 _96966
500			_aV.1: Introduction and fundamentals, V.2: Design and fabrication, V.3: Applications
250			_a2nd ed.
020			_a0-8493-9137-7
952			_w2009-10-22 _p00055116 _r2009-10-22 _40 _00 _bUL _10 _o621(035) GAD.1 R _d2009-10-22 _71 _cREF _2udc _yREF _aUL
952			_w2012-11-02 _p00055117 _r2012-11-02 _40 _00 _bUL _10 _o621(035) GAD.2 R _d2012-11-02 _71 _cREF _2udc _yREF _aUL
952			_p00055118 _40 _00 _bUL _10 _o621(035) GAD.3 R _d2012-11-02 _71 _cREF _2udc _yREF _aUL
999			_c9081 _d9080