000 nam a22 7a 4500
999 _c97543
_d97542
005 20190814105512.0
008 190114b ||||| |||| 00| 0 eng d
020 _a9783527339129
080 _a621.383.51
_bATO
245 _aAtomic layer deposition in energy conversion applications
260 _aGermany
_bWiley-VCH
_c2017
300 _axxv,281p.
653 _aSolar cells
700 _aBachmann, Julien Ed.by
942 _cBK