000 00957nam a22002895i 4500
999 _c97594
_d97593
005 20190824143350.0
008 180420s2018 nyu 000 0 eng
020 _a9789811300974
080 _a621.71.9
_bMIC R
245 1 0 _aMicro and nano fabrication technology
260 _aSingapore
_bSpringer
_c2018
300 _axx, 957 p.
490 0 _aMicro/nano technologies
653 _aEngineering
653 _aBiomedical engineering
653 _aNanotechnology
700 _aYan, Jiwang Ed.by
942 _cREF