| 000 | nam a22 7a 4500 | ||
|---|---|---|---|
| 999 |
_c97772 _d97771 |
||
| 005 | 20190831092518.0 | ||
| 008 | 190202b ||||| |||| 00| 0 eng d | ||
| 020 | _a9781119053835 | ||
| 080 |
_a621.382 _bCOR |
||
| 110 | _aCorigliano Alberto | ||
| 245 | _aMechanics of microsystems | ||
| 260 |
_aChennai _bWiley _c2018 |
||
| 300 | _axxii,397p. | ||
| 490 | _aThe Wiley micro system and nanotechnology series | ||
| 653 | _aMicroelectromechanical systems | ||
| 653 | _aMEMS | ||
| 700 | _aArdito, Raffaele | ||
| 700 | _aComi, Claudia | ||
| 700 | _aFrangi, Attilio | ||
| 700 | _aGhisi, Aldo | ||
| 700 | _aMariani, Stefano | ||
| 942 | _cBK | ||