000 nam a22 7a 4500
999 _c97948
_d97947
005 20191014111731.0
008 190205b ||||| |||| 00| 0 eng d
020 _a9781498741330
080 _a535.317:620.3
_bOPT
245 _aOptical mems, nanophotonics, and their applications
260 _bCRC Press
_aBoca Raton
_c2018
300 _axiv,432p.
653 _aNanophotonics
_aOptical MEMS
700 _aZhou, Guangya ed.by
710 _aLee, Chengkuo ed.by
942 _cBK