000 00539nam a22001577a 4500
005 20091110122054.0
008 091110t xxu||||| |||| 00| 0 eng d
080 _a621.3.049.774
_bGIS
100 _aGise, Peter E
_99423
245 _aSemiconductor and integrated circuit fabrication techniques
260 _aVirginia
_bReston
_c1979
_94941
300 _aix, 209p.
700 _aPeter E Gise
_99424
942 _cBK
952 _w2009-11-10
_p00017548
_r2009-11-10
_40
_00
_bUL
_10
_o621.3.049.774 GIS
_d2009-11-10
_70
_2udc
_yBK
_aUL
999 _c9960
_d9959