Chemical vaper deposition, Thermal & plasma deposition of electronic materials (Record no. 3159)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00685nam a22001697a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20090827121022.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 090827t xxu||||| |||| 00| 0 eng d |
| 080 ## - UNIVERSAL DECIMAL CLASSIFICATION NUMBER | |
| Universal Decimal Classification number | 621.3.049.77 |
| Item number | SIV |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Sivaraman, S. |
| 245 ## - TITLE STATEMENT | |
| Title | Chemical vaper deposition, Thermal & plasma deposition of electronic materials |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xii, 292p. |
| 653 ## - INDEX TERM--UNCONTROLLED | |
| Uncontrolled term | Microelectronics industry |
| -- | Chemical vapour deposition |
| -- | Micro electronics-materials |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| item type | Books |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | New York |
| Name of publisher, distributor, etc | Van Nostrand reinheld |
| Date of publication, distribution, etc | 1995 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0-442-01079-6 |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| -- | 3523 |
| Lost status | Source of classification or shelving scheme | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Date checked out | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Universal Decimal Classification | University Library | University Library | 27/08/2009 | 7 | 621.3.049.77 SIV | 00041594 | 09/10/2014 | 29/09/2014 | 27/08/2009 | Books |