Nano and micro electomechanical systems: fundamentals of nano and microengineering

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Publication details: Boca Raton CRC Press 2005Edition: 2nd edDescription: 722pISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books	University Library	621.382:620.3 LYS (Browse shelf(Opens below))	Available		00055255

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Previous	621.382:620.1 SUM.2 Defects control in semiconductors: Proceedings of the conference on the science and technology of defect control in semiconductors,...	621.382:620.3 GAT Micro and nanofabrication	621.382:620.3 JHA MEMS and nanotechnology-based sensors and devices for communications, medical and aerospace applications	621.382:620.3 LYS Nano and micro electomechanical systems: fundamentals of nano and microengineering	621.382:620.3 LYS/M MEMS and NEMS: systems devices and structures	621.382:620.3 MAD.1 R Fundamentals of microfabrication and nanotechnology	621.382:620.3 MAD.2 R Fundamentals of microfabrication and nanotechnology	Next

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