Selected papers on resolution enhancement techniques in optical lithography-Bellingham

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Series: (SPIE milestone series v.178)Publication details: Washington SPIE Press 2004 Description: xx, 875pISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books	University Library	621.3.049.77 SCH (Browse shelf(Opens below))	Available		00053942

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Previous	621.3.049.77 SAN Digital concepts using standards integrated circuits	621.3.049.77 SAN;1 Digital concepts using standard integrated circuits	621.3.049.77 SCA Printed circuit boards for microelectronics	621.3.049.77 SCH Selected papers on resolution enhancement techniques in optical lithography-Bellingham	621.3.049.77 SEM Molecular and nano electronics: analysis design and simulation	621.3.049.77 SES R IC schematic source master	621.3.049.77 SHM Computer arithmetics for nanoelectronics	Next

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