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Plasma electronics applications in microelectronic device fabrication Toshiaki Makabe and Zoran Lj Petrovic

By: Contributor(s): Publication details: 2015 CRC Press New YorkEdition: 2nd edDescription: xxxv, 376pISBN:
  • 9781482222050
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Item type Current library Call number Status Date due Barcode
Books Books University Library 533.922 MAK (Browse shelf(Opens below)) Available 00072239

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